JPH0335433Y2 - - Google Patents
Info
- Publication number
- JPH0335433Y2 JPH0335433Y2 JP9286787U JP9286787U JPH0335433Y2 JP H0335433 Y2 JPH0335433 Y2 JP H0335433Y2 JP 9286787 U JP9286787 U JP 9286787U JP 9286787 U JP9286787 U JP 9286787U JP H0335433 Y2 JPH0335433 Y2 JP H0335433Y2
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- solvent gas
- liquid level
- cap
- precision cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002904 solvent Substances 0.000 claims description 77
- 239000007788 liquid Substances 0.000 claims description 36
- 238000004140 cleaning Methods 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000009835 boiling Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9286787U JPH0335433Y2 (en]) | 1987-06-17 | 1987-06-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9286787U JPH0335433Y2 (en]) | 1987-06-17 | 1987-06-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63201691U JPS63201691U (en]) | 1988-12-26 |
JPH0335433Y2 true JPH0335433Y2 (en]) | 1991-07-26 |
Family
ID=30954942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9286787U Expired JPH0335433Y2 (en]) | 1987-06-17 | 1987-06-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0335433Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190132350A (ko) * | 2017-04-13 | 2019-11-27 | 가부시키가이샤 호리바 에스텍 | 기화 장치 및 기화 시스템 |
-
1987
- 1987-06-17 JP JP9286787U patent/JPH0335433Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS63201691U (en]) | 1988-12-26 |
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